Corrosion Resistance of Aluminum Nitride Ceramics Modified by Pre-Oxidation and Sputtering Metallization in Water at 100Ž
Hiroyasu TAMAI, Takashi HAMAUZU, Akihito RYUMON, Hitohumi TANIGUCHI, Kaoru AOKI, Kohei ODA and Tetsuo YOSHIO
Abstract:Corrosion behavior of AlN ceramics in water at 100Ž and corrosion resistance of those pre-oxidized or metallized were investigated. The weight of AlN parabolically gained by reaction with water. Al2O3 layer formed by high temperature oxidation reduced the corrosion of AlN and weight gain of the specimens with 2ƒÊm thick Al2O3 layer was 1/10 or less after corrosion for 10 d. Weight change of the specimens with AlOOH layer formed by hydrothermal treatment was not found after corrosion. In the case of the specimens metallized 3ƒÊm thick Ni or Cu film by sputtering method, the film was oxidized but the corrosion of AlN substrate was not found. Al2O3 and AlOOH layer prepared by oxidation of AlN and sputtered Ni or Cu film improved remarkably the corrosion resistance of AlN substrate. Key Words:AlN ceramics, Al2O3, AlOOH, Ni, Cu, Oxidation, Sputtering, Corrosion, Corrosion resistance