Residual Stress Distribution in TiN Thin Films with Fiber Texture Measured by Grazing Incidence and Scattering Vector X-Ray Methods
Keisuke TANAKA, Yoshiaki AKINIWA, Masanori KAWAI and Toshimasa ITO
Abstract:Titanium nitride (TiN) thin films with the thickness of 0.1, 0.2, 0.5, 1.0, 2.0 and 4.0 mm were coated on a carbon steel substrate by the ion beam mixing method. The film had a strong fiber texture with <001> axis perpendicular to the film surface. The distribution of the residual stress in thin films was measured by the grazing incidence X-ray diffraction (GIXD) and the scattering vector (SV) methods. The in-plane stress measurement by GIXD was applicable to the thickness down to 0.2 mm of TiN films. The stress was a compression of around 2 to 3 Gpa. The compressive stress was found to increase in the very-near surface region of 20 to 30 nm in depth. Thinner films had a steeper increase of the compressive stress in the very-near surface region. @The strain distribution measured by the SV method using Cr-Ka radiation was nearly constant over the region of the penetration depth between 0.3 and 0.6 mm from the surface, and that by using synchrotron X-rays was also constant over the penetration depth from 0.4 to 1mmDThe stress distributions measured by the in-plane measurement and the one-tilt method combined with the surface removal method showed a good agreement with each other. The compressive residual stress was uniform within thin films except very near the surface of about 20 to 30 nm in depth. Key Words:X-ray stress measurement, Grazing incidence X-ray diffraction, Scattering vector method, Titanium nitride, Thin films, Residual stress, Fiber texture